Error And Warning Messages 83
iina74e 08.fm technical handbook(1408)
8.2 List of Errors & Warnings
The following pages contain a list of all errors and warnings displayed at the control
panel. Warning messages are indicated by numbers with a leading W. Error
messages are indicated by numbers with a leading E
.
No. Displayed Message Description and possible solutions
W15 Leak rate is too high! Machine
switched into stand-by to
prevent contamination
The survey function „contamination“ is activated. A leak rate higher than
the adjusted value was detected.
•Gross leak
• Switch off limit is set too low
• Alarm delay time too short
W16 Turbo molecular pump
service interval expired!
The service interval for the turbo molecular pump is expired.
W17 Forepump service interval
expired!
The service interval for the fore pump is expired.
W18 Exhaust filter service interval
expired!
The service interval for the exhaust filter is expired.
W21 EEPROM write timeout! EEPROM defective
MC 68 defective
W22 EEPROM parameter queue
overflow!
EEPROM defective
MC 68 defective
E23 24V of the OPTION socket is
too high
The tension 24V at socket OPTION is too high.
E24 24V at socket OPTION is too
low
• Fuse F2 on the I/O board has blown
E25 Receded valve voltage too
low (< 7V)
• I/O board is faulty.
W28 Real time clock reset! Please
enter date and time!
• Battery at MC68 is discharged or faulty.
• MC68 had been replaced.
E29 24V supply for fans is too low
(< 20V)
• Fuse F1 on wiring backplane has blown.
E30 24 V of the remote control is
too low (> 20V).
• Fuse F1 on the I/O-board has blown.
W31 The offset voltage of the
preamplifier is too high
(> 5mV)
• The preamplifier is faulty.
W32 Preamplifier temperature is
too high (> 60°C)
• Ambient temperature is too high.
• Air filter dirty.
W33 Preamplifier temperature is
too low (< 2°C)
• Ambient temperature is too low.
• Temperature sensor is faulty.
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