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Inficon UL5000 User Manual

Inficon UL5000
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Maintenance works 95
iina74e 09.fm technical handbook(1408)
9.6 Description of the maintenance work
Only trained specialist staff can performe more changes at the UL5000 than the
normally maintenance work.
9.6.1 Opening the UL5000
Required tool
Wedge (Accessories).
Separate the UL5000 from other vacuum components at the inlet port.
Remove the side covers by using the wedge (Fig. 9-1). Push down the wedge to
release the side covers.
The location for the wedge is marked with two dot marks at the top side of the side
covers (See Fig. 9-1/2).
Open the both side covers in the same way.
STOP
Danger
The protective conductor screw at the chassis plate should not be loosened. The
operator is not protected against electric shock by working without a protective
conductor line.
STOP
Danger
Disconnect the power cord from the UL5000 before opening the side cover.

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Inficon UL5000 Specifications

General IconGeneral
BrandInficon
ModelUL5000
CategorySecurity Sensors
LanguageEnglish

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