90 Maintenance works
iina74e 09.fm technical handbook(1408)
9.4 Maintenance Plan
*) every 2 years regardless of operation hours
Required maintenance Operation hours/Years Repair
level
Assembly UL5000 1500 4000 8000 16000 Part no.
1/4 1 2
Vacuum system
Scroll pump IWATA Exchange the scrollmodule X III 200000021R
ISP 500
Scroll pump Varian Exchange the Tip Seal X
1
III 200001671
TS 620 Exchange the scrollmodule X III 200001665R
TMH 071 Replace the lubricant reservoir X* II u. III 200000577
Exchange of bearings X III
Valve bloc Clean the valves, replace seals for valves 2 X III 200000594
Take apart the valve bloc and clean it 2 X III 200000593
Replace filters for vent- and purge line 1 X
1
I, II ,III 200000683
Adjust the Pirani X III
Silencer Exchange the silencer X
1
I, II, III 20099183
Electric
Fans assembly Clean fans at chassis plate and side wall
e.g by pressurized air
1 X
1
I
Exchange spare filter cell for fans chassis
plate
1 X
1
I 20000685
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