Inficon UL5000 User Manual

94 Maintenance works
iina74e 09.fm technical handbook(1408)
9.5.4 16000 hours maintenance
The 8000 hours maintenance should be performed by an INFICON service tech-
nician or an other authorized person.
After 16000 working hours the bearing of the turbo pump and the different kind of fore
pump will reach their expecting life time.
The scroll module (IWATA ISP 500 or Varian TS 620) and the turbo pump must be
replaced.
The maintenance work will take approximately 10.0 hours.
Work to be performed Required materials P/N
Exchange the scroll module (IWATA ISP-
500B)
• Scroll module for IWATA ISP-500B 200000217R
Exchange the scroll module (Varian TS
620)
• Scroll module for Varian TS 620 200001665R
Replace TMH 071 • Turbo pump TMH 071 200000569R
Take apart the valve bloc and clean it
Replace the seals for valves
• Set of seals for valve bloc
• Set of seals for valves
200000593
200000594
Check and/or replace Filters • Spare Filter Cell for the fans
• Spare Filter for venting and purge line
• Silencer for exhaust (only UL1000 Fab)
200000685
200000683
20099183
Functional check and adjustement

Inficon UL5000 Specifications

General

Brand	Inficon
Model	UL5000
Category	Security Sensors
Language	English