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Inficon UL5000 User Manual

Inficon UL5000
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92 Maintenance works
iina74e 09.fm technical handbook(1408)
9.5.2 4000 hours maintenance
The 4000 hours maintenance should be performed by an INFICON service tech-
nician or another authorised person at least yearly.
Independently of 4000 working hours the lubricant reservoir of the Turbomolecular
pump and the oil in the Fore pump should be replaced at least yearly.
Notice: The internal Helium standard leak certificate is valid for one year after
delivery. The annual refurbishing of the internal Helium standard leak is
recommended and an other certificate will be delivered. The internal
Helium standard leak can be refurbished at INFICON GmbH in Cologne
exclusively.
The maintenance work will take approximately 3 hours.
Work to be performed Required materials P/N
Replace the Lubricant Reservoir of the
Turbomolecular Pump TMH 071
(every 2 years)
Lubricant Reservoir for TMH 071 200000577
Check and/or replace Filters Spare Filter Cell for the fans
Spare Filter for venting and purge line
Silencer for exhaust (only UL1000 Fab)
Filter cell for oil filter.
200000685
200000683
20099183
200000694
Functional check and adjustement

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Inficon UL5000 Specifications

General IconGeneral
BrandInficon
ModelUL5000
CategorySecurity Sensors
LanguageEnglish

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