84 Error And Warning Messages
iina74e 08.fm technical handbook(1408)
E34 24V voltage at MSV board is
too low!
Signal MVPZN on the MSV board is active. 24 V signal voltage is too low,
U < 18.3 V.
• Fuse F1 on the MSV board has blown.
• 24 V power supply voltage is missing.
Switch off the UL5000!
The missing voltage will cause the exhaust valve on the scroll pump to
close which in turn can lead to a contamination of the vacuum system.
• Reference voltage UREF on the MSV board XT7/1 is too high, U > 5 V.
E35 Anode-cathode voltage is too
high!
• MSV board is faulty.
• Anode-cathode voltage is higher than 130 V.
E36 Anode-cathode voltage is too
low.
• MSV board is faulty.
• Anode-cathode voltage is lower than 30 V.
E37 Suppressor voltage reference
value too high!
Signal MFSZH on MSV board is active. Suppressor signal command
variable is too high.
• Suppressor voltage has a short circuit.
• MSV is faulty.
E38 Suppressor potential too
high!
Suppressor potential is higher than 363V.
• MSV board is faulty.
E39 Suppressor potential is too
low
Suppressor potential is lower than 297V.
• MSV board is faulty.
E40 The anode potential exceeds
its nominal value by over
10%!
The actual anode potential exceeds its nominal value by 10%. The
nominal value can be displayed in the service menu.
• MSV is faulty.
E41 The anode potential has
dropped below its nominal
value by over 10%!
The actual anode potential has dropped below its nominal value by 10%.
The nominal value can be displayed in the service menu.
• Air inrush.
• MSV is faulty.
E42 Nominal value of the anode
potential is too high!
Signal MFAZH on MSV board is active.
• Anode voltage has been short circuited.
• Nominal value of the anode voltage is too high. Anode voltage is limited
to about 1,200 V.
E43 Cathode current is too high! • Signal MPKZH on MSV board is active. Cathode current is too high, I
> 3.6 A.
• MSV is faulty.
E44 Cathode current is too low! • Signal MPKZN on MSV board is active. Cathode current is too low, I >
0.2 A.
• MSV is faulty.
W45 Emission for cathode 1 can
not be switched on!
Signal MSIBE on MSV board is not active. Emission for cathode 1 can not
be switched on. UL5000 switches to cathode 2. Please order a new ion
source.
W46 Emission for cathode 2 can
can not be switched
Signal MSIBE on MSV board is not active. Emission for cathode 2 can not
be switched on. UL5000 switches to cathode 1. Order a new ion source.
No. Displayed Message Description and possible solutions
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