Inficon UL5000 User Manual

Table of contents 5
iina74e 0.fm technical handbook(1408)
7.2.1.2 Manual Internal Calibration 78
7.2.2 External Calibration 78
7.3 Factor of Calibration - Range of Values 81
8 Error And Warning Messages 82
8.1 Hints 82
8.2 List of Errors & Warnings 83
9 Maintenance works 88
9.1 Hints 88
9.2 INFICON Service 89
9.3 Key for Maintenance Schedule 89
9.4 Maintenance Plan 90
9.5 Maintenance groups 91
9.5.1 1500 hours maintenance 91
9.5.2 4000 hours maintenance 92
9.5.3 8000 hours maintenance 93
9.5.4 16000 hours maintenance 94
9.6 Description of the maintenance work 95
9.6.1 Opening the UL5000 95
9.7 Check/Replace the filter cell 96
9.8 Replacing the Exhaust Silencer 98
9.9 Turbomolecular pump TMH 071 99
9.10 Scroll Pump 99
Appendix 100
Declaration of Conformity 102

Inficon UL5000 Specifications

General

Brand	Inficon
Model	UL5000
Category	Security Sensors
Language	English