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4200A-SCS
Keithley 4200A-SCS User Manual
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Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments.
All other trademarks and trade names are the property of their respective companies.
Keithley Instruments
Corporate Headquarters • 28775
Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • 1-800-833-9200 • tek.com/keithley
07/2020
183
Table of Contents
Default Chapter
6
Table of Contents
6
Introduction
10
Models 4220-PGU and 4225-PMU
10
Connections
12
Introduction
12
Connection Guidelines
12
PMU Common Connections
13
Shield Connections
13
Cable Length
14
High Frequency Connections
14
Prober Chuck Connections
14
PGU and PMU Connectors
15
Model 4225-RPM
15
RPM Input, Output, and Top Panels
15
Connecting the RPM to the PMU
17
RPM Diagrams for Local and Remote Sensing
18
Using the RPM as a Switch
19
Two-Terminal Device Connections
20
Three-Terminal Device Connections
22
Four-Terminal Device Connections
23
Pulse Source-Measure Connections
24
Pulse Generator Connections
24
Using an Adapter Cable to Connect Pulse Card to DUT
25
Connections to Prober or Test Fixture Bulkhead Connectors
25
RPM Connections to DUT
26
Local Sensing
26
RPM Connections to a Prober
27
PMU Connection Compensation
29
Short Compensation
29
Offset Current Compensation
30
Perform Connection Compensation
30
Enabling Connection Compensation
31
Load-Line Effect Compensation (LLEC) for the PMU
32
Methods to Compensate for Load-Line Effect
33
How LLEC Adjusts Pulse Output to the Target Levels
33
Coping with the Load-Line Effect
35
LLEC Maintains Even Voltage Spacing
36
Test Considerations
37
LPT Functions Used to Configure LLEC
37
Enable LLEC
38
Disable LLEC and Set the Output Impedance
39
Setting up Pmus and Pgus in Clarius
40
Introduction
40
Configure the PGU, PMU, and RPM Using Tests
40
Create a PMU Project
41
Configure the Tests
41
PMU Operation Modes
43
PMU - All Terminal Parameters
45
Start (PMU Amplitude Sweep)
45
Stop (PMU Amplitude Sweep)
45
Step (Pulse Amplitude Sweep)
45
Points
46
Base
46
Amplitude
46
Dual Sweep (Pulse)
46
Force Range (PMU)
47
Disable Outputs at Completion
47
Current Spot Mean High
47
Current Spot Mean Low
47
Measure Current Range (PMU)
48
Low Range
49
Current Sample Waveform
49
Voltage Spot Mean High
49
Voltage Spot Mean Low
49
Voltage Sample Waveform
49
Report Timestamps
49
Report Status (PMU)
50
PMU Measurement Status
50
Compensation Short Connection
53
Load Line Effect Compensation
53
DUT Resistance (R DUT)
53
Max Voltage Estimator
54
Threshold Current
54
Threshold Voltage
54
Threshold Power
54
PMU Test Settings
55
Test Mode (PMU)
55
Measure Mode
56
Number of Pulses
58
Timing Sweep
58
Period
59
Width
59
Rise Time
60
Fall Time
60
Pulse Delay
60
Settling Times
61
Sweep Master
62
Output Values
62
Formulator
62
PMU Pulse Timing Preview
63
PMU Amplitude Sweep Example (One-Channel)
64
PMU Amplitude Sweep and Step Example (Two-Channel)
66
Higher Channel Count Test Example
69
Pulse Parameter Definitions
73
PMU Minimum Settling Times Versus Current Measure Range
73
PMU Capacitive Charging/Discharging Effects
74
PMU and RPM Measure Ranges Are Not Source Ranges
77
4220-PGU and 4225-PMU Output Limitations
78
Configure the PGU, PMU, and RPM Using Tests
78
Step or Sweep Multiple Device Terminals in the same Test
79
Basic Troubleshooting Procedure
82
Step 1. Verify Prober Connections from the PMU or RPM to the DUT
82
Step 2. Verify the Pulse Shape
83
Step 3. Is the Pulse Level Correct for each Channel
84
Step 4. Is the Pulse I-V Curve Suspect
84
Pulse Card Concepts
90
Models 4220-PGU and 4225-PMU
90
PMU Block Diagram
91
Pulse Modes
92
Pulse Measurement Types (PMU)
92
Measure Modes
93
4200A-SCS Power Supply Limitations
94
Pulse Source-Measure Concepts
96
Ultra-Fast I-V Tests
97
Sample Rate
98
Segment Arb Waveform
99
Full Arb Waveform
102
Pulse Waveforms for Nonvolatile Memory Testing
103
Waveform Capture
104
DUT Resistance Determines Pulse Voltage Across DUT
104
Triggering
109
Measurement Types
112
Spot Mean Measurements
113
Spot Mean Discrete Readings
113
Spot Mean Average Readings
114
Waveform Measurements
114
Waveform Discrete Readings
115
Waveform Average Readings
116
Measurement Timing
116
Kpulse (for Keithley Pulse Cards)
120
Keithley Pulse Application
120
Kpulse Setup and Help
121
Triggering
122
Standard Pulse Waveforms
122
Segment Arb Waveforms
124
Exporting Segment Arb Waveform Files
126
Custom File Arb Waveforms (Full Arb)
127
Custom Arb File Operation: Select and Configure Waveforms
128
Custom Arb File Operation: Copy Waveforms into Sequencer
129
Custom Arb File Operation: Load Waveform and Turn on Output
131
Waveform Types
132
Use the RPM to Switch the SMU, CVU, and PMU
140
Introduction
140
Equipment Required
140
Update the RPM Configuration in Kcon
141
Device Connections
142
Connection Schematic
142
Connect the 4200A-SCS to the DUT
143
Set up the Measurements in Clarius
144
Create a New Project
144
Add a Device
145
Search for and Select Existing Tests in the Test Library
145
Configure the Vfd Test
147
Configure the CV-Diode Test
149
Configure the Pulse-Diode Test
151
Run the Test
153
View and Analyze the Test Results
154
PMU for Pulsed I-V Measurements on a MOSFET
156
Introduction
156
Equipment Required
157
Device Connections
157
Connection Schematic
158
Set up the Measurements in Clarius
159
Create a New Project
159
Search for and Select an Existing Test
160
Configure the Test
161
Run the Test and Analyze the Results
163
Testing Flash Memory
164
Testing Flash Memory
165
Flash Connection Guidelines
166
Programming and Erasing Flash Memory
166
Endurance Testing
172
Connections for Endurance Testing - no Switch Matrix
172
Connections for Endurance Testing - Switch Matrix
174
Disturb Testing
175
Connections for Disturb Testing
175
Using a Switch Matrix
177
Use Kpulse to Create and Export Segment Arb Waveforms
178
Enter Segment Arb Values into UTM Array Parameters
179
Direct Connections to Single DUT
180
Direct Connections to Array DUT for Disturb Testing
182
Other manuals for Keithley 4200A-SCS
Reference Manual
1381 pages
Quick Start Guide
18 pages
4
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Keithley 4200A-SCS Specifications
General
Brand
Keithley
Model
4200A-SCS
Category
Measuring Instruments
Language
English
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