Microtest 6632 Series - Measurement Accuracy

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Measurement accuracy
Conditions of accuracy
All specifications apply at 23 ± 5 °C, and 60 minutes after the instrument has been turned on.
Impedance measurement accuracy at 4-terminal test fixture (Typical at > 10 MHz)
|Z|, |Y| accuracy
± Ae [%], Where Relative accuracy Ae = ( Ab + Az + Av + Ad ) × Kc × Kt
[%]
θ accuracy
± Ae / 100 [rad]
L, C, X, B accuracy
at Dx ≤ 0.1
± Ae [%]
at Dx > 0.1
± Ae × √ 1+Dx
2
[%]
R accuracy
at Dx ≥ 10, (Qx ≤0.1)
± Ae [%]
at 0.1 < Dx < 10, (10 >
Qx>0.1)
Rs: ± Ae × √ 1+Dx
2
/ Dx [%], Rp: ± Ae × √ 1+Dx
2
/ ( Dx Ŧ Ae /100 × √
1+Dx
2
) [%]
at Dx ≤ 0.1, (Qx ≥ 10)
Rs: ± Ae / Dx [%], Rp: ± Ae / ( Dx Ŧ Ae /100 ) [%]
G accuracy
at Dx > 0.1
± Ae × √ 1+Dx
2
/ Dx [%]
at Dx ≤ 0.1
± Ae / Dx [%]
D accuracy
at Dx ≤ 0.1
± Ae / 100
at 0.1 < Dx ≤ 1
± Ae × (1+ Dx) / 100
Q accuracy (at Qx × Da < 1)
at Qx > 10, (Dx < 0.1)
± (Qx
2
× Ae /100) / (1 Ŧ Qx × Ae /100)
at Qx ≤ 10, (Dx ≥ 0.1)
± (Qx
2
× Ae (1+ Dx) / 100) / (1 Ŧ Qx × Ae (1+ Dx) / 100)
NOTE: Da : measurement accuracy of D, Dx : measurement value of D, Qx : measurement value of Q
Ae = ( Ab + Az + Av + Ad ) × Kc × Kt [%]
Frequency: F[Hz], Fm[MHz]
F < 200Hz: 0.08 + (200 / F - 1) × 0.0222
Ab [%]
200Hz ≤ F ≤ 500kHz: 0.08
F > 500KHz: 0.08 + (Fm - 0.5) x 0.0472
Impedance Range [Ω]
Zx ≤ 100Ω : (100 / Zx - 1) x 0.001 x Km
F < 100Hz: Km = 1 + (100/F - 1) x 0.112, 100Hz ≤ F ≤ 1MHz: Km = 1, F > 1MHz: Km = 1 + (Fm -
1) x 3
Az [%]
Zx > 100Ω : (Zx/100 - 1) x 0.00001 x Kn x Kp
F < 100Hz: Kn = 1 + (100/F - 1) x 0.112, 100Hz ≤ F ≤ 50KHz: Kn = 1, F > 50KHz: Kn = F/50K
F ≤ 1MHz: Kp = 1, F > 1MHz: Kp = 1 + (Fm-1) x 0.5
Signal Level [V]
Av [%]
Vac > 0.5V: (Vac - 0.5)² x 0.45 x (1 + Fm/30)
Vac ≤ 0.5V: (0.5/Vac - 1) x 0.25
Measurement Speed
(5) SLOW2: 0
Ad [%]
(4) SLOW : 0
(3) MED : 0.1
(2) FAST : 0.2
(1) MAX : 0.4
Cable length [m]
Kc
0 m: 0 Fm: 0 to 30 [MHz]
0.5 m: 0.02 + 0.01 × Fm Fm: 0 to 20 [MHz]
1 m: 0.02 + 0.02 × Fm Fm: 0 to 10 [MHz]
2 m: 0.02 + 0.03 × Fm Fm: 0 to 5 [MHz]
Temperature [°C]
Kt
8 - 18°C: 4
18 - 28°C: 1 + (T - 23) ² x 0.0139
28 - 38°C: 4