Mirae Mx200 - Emergency Software; Errors

5-26 Mx-Series Manual
13020 -
13027
Error occurred while
the nozzles (Front
Gantry Head 1- 6)
were picking up chips
Check the setting and operation
status of ANC.
13030 -
13037
Error occurred while
the nozzles (Rear
Gantry Head 1- 6) were
picking up chips
Check the setting and operation
status of ANC.
14001
Settling error of shuttle,
H-axis
Not applicable to Mx Series
14002
The interlock sensor of
the shuttle pallet is
detected.
Not applicable to Mx Series
14003
Undefined pallet is
detected.
Not applicable to Mx Series
14004
The shuttle conveyor
failed to load the board.
Not applicable to Mx Series
14005
The shuttle conveyor
failed to unload the
board.
Not applicable to Mx Series
21000
Waiting for the board
request signal from the
succeeding machine
Check the conveyor.
5-46
21001
Remove the substrate
from the entrance.
Check the conveyor.
5-46
21002
Remove the substrate
from the exit.
Check the conveyor.
5-46
21003
Waiting for feeding a
substrate to the inlet.
Check the conveyor.
5-46
Solutions for Errors
1. Emergency SOFTWARE
[Errors]
 The Emergency SOFTWARE is pressed.
[Solutions]  Restore the emergency
SOFTWARE and retry.
 Check defect or contact failure of the emergency SOFTWARE.
The Emergency Switches installed at the front right and the rear right are
used to stop the machine in an emergency.