3-2 Mx-Series Operation Manual
AIR CONNECTION
LOCATIONS.....................................................................3-15
AIR
CONNECTION..................................................................................
............3-15
SMEMA
CONNECTION..................................................................................
...3-16
POWER SPECIFICATION AND
CONNECTION...........................................3-17
GROUNDING....................................................................................
...................3-17
CUSTOMER SETUP CHECK
SHEET.............................................................3-18
CIS-1 : SETUP FLOW
CHART(UTILITY).........................................................3-19
CIS-2 : SETUP FLOW CHART
(PRECISION)................................................3-20
CIS-3 : UTILITY & LINE
LAYOUT......................................................................3-21
CUSTOMER SETUP CHECK
MANUAL.........................................................3-22
CIS 3 : UTILITY & LINE
LAYOUT......................................................................3-22
CIS-4: ASSEMBLY
CHECK...............................................................................3-24
CIS 4 : ASSEMBLY
CHECK..............................................................................3-25
CIS-5 : OPERATION &
PARAMETERS..................................................................3-29
CIS 5 : OPERATION & PARAMETERS
CHECK...........................................3-30
CIS-6 : W/U, DRY RUN &
PLACEMENT.........................................................3-32
CIS 6 : W/U, DRY RUN &
PLACEMENT..........................................................3-32
CIS-7 : PROBLEMS &
REQUESTS..................................................................3-33
CIS 7 : PROBLEMS &
REQUESTS..................................................................3-33
Figure List