2 INSTALLATION
This chapter describes the system installation environment and
system component connection.
2.1 Installation Environment
1. Temperature
This measuring system has been assembled and adjusted in a 20°C
temperature-controlled room. In order to use this system at the accuracy given in the
specifications it is necessary to install this system in a place where the ambient
temperature is close to 20°C and the temperature variation is as small as possible.
According to the "Standard Precision Measurement Environment" specified in the Japan
Precision Measuring Machine Engineering Association Standard, JMAS5001, the ideal
installation environment is 20°C±1°C as per Standard Temperature State Class 1.) Also,
the temperature gradient should be 2°C as reference for 8 hours. When the temperature
environment is below this level, it may not be possible to attain the expected accuracy as
given in the specifications. In this condition, if accuracy adjustment is attempted, normal
adjustment is not guaranteed, and at 20°C inaccurate measurements may result.
2. Humidity
Humidity will not directly affect the accuracy of the measuring machine, however, high
relative humidity may easily oxidize critical parts of the machine. Electronic parts may also
be adversely affected. To avoid these problems maintain the ambient humidity between 55
and 65% as much as possible.
3. Vibration
When this measuring system is operated in an environment with significant vibrations,
measurement data will not be stable and show variations.
Vibration condition:
Vibration conditions to be met are an amplitude of 2µm P-P or less at a frequency of 10 Hz
or less, and an acceleration of 0.004 m/s (0.4 Gal) or less at a frequency of 10 to 20 Hz.
If exceeding the above condition, take the anti-vibration measure.
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