Supported External Devices
Alignment is supported for the following external devices.
Type
Stages X (Y)
Xθ θ axis: Direct drive Camera axis movement: None
Camera axis movement: X axis
θ axis: Linear drive Camera axis movement: None
Camera axis movement: X axis
Yθ θ axis: Direct drive Camera axis movement: None
Camera axis movement: Y axis
θ axis: Linear drive Camera axis movement: None
Camera axis movement: Y axis
θX θ axis: Direct drive Camera axis movement: None
Camera axis movement: X axis
θ axis: Linear drive Camera axis movement: None
Camera axis movement: X axis
θY θ axis: Direct drive Camera axis movement: None
Camera axis movement: Y axis
θ axis: Linear drive Camera axis movement: None
Camera axis movement: Y axis
XY
XYθ θ axis: Direct drive Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
θ axis: Linear drive Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
θXY θ axis: Direct drive Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
XYθ θ axis: Linear drive Camera axis movement: None
Camera axis movement: X axis
Camera axis movement: Y axis
Camera axis movement: XY axes
UVW Direct fulcrum motion
Rotary fulcrum motion
UVWR Direct fulcrum motion
Rotary fulcrum motion
Robots 3 axes
4 axes Control method: Fixed positions
Control method: Measured positions
10 Advanced Usage
10 - 53
FH/FHV Series Vision System User’s Manual (Z365-E1)
10-9 Positioning workpieces for stage and
robot applications [Alignment Function]
10
10-9-1 Overview