Pfeiffer ASM 340 - Physical Dimensions and Drawings

Technical data and dimensions
69
Conversion table: gas throughput units
11.4 Dimensions
mbar l/s Pa m
3
/s sccm Torr l/s atm cm
3
/s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m
3
/s 10 1 592 7.5 9.87
sccm 1.69 · 10
-2
1.69 · 10
-2
1 1.27 · 10
-2
1.67 · 10
-2
Torr l/s 1.33 1.33 78.9 1 1.32
atm cm
3
/s 1.01 0.101 59.8 0.76 1
139
253
375
350
547
389
227
122
90
364