Chapter 3 Gas-Flow Controller
GC-2014 Service Manual
61
2PC, HOUSING
26 221-19502-08
1PC, RESISTANCE TUBE, HYDROGEN, GC-8A
27 201-47435
3PC, RUBBER PLUG, PORT, SILICON
28 221-09864-18
2PC, PIPE, MF-MM17, 2 × 180
29 221-41408-94
1PC, PIPE, PG-MF-MF ASSY
32 221-19503-08
2PC, RESISTANCE TUBE, AIR, GC-8AF
33 221-41410-91
1PC, PIPE, M5-MF ASSY
34 221-41527-92
1PC, PIPE, PG-MF-MF-MMASS
37 201-48557-25
2PC, PIPE, MN2W-MM2W
38 072-83071-08
1PC, MARK BAND H
39 072-83071-01
1PC, MARK BAND A
3.1.2
Manual Flow Controller
3.1.2.1 FID
Reference No.
221-70049-91 11 221-18150-91
FLOW CONTROLLER, 1PC, N BELLOW VALVE, 2K
H2-AIR,FID
12 221-41511-91
1PC, N BELLOW VALVE, 2K, WITH RESISTANCE
16 670-18558-11
2PC, PRESSURE GAUGE, 200 KPA
17 018-21330
TAPE, STICKER, 0.1 × 13 × 5
22 221-70483-91
1PC, SOLENOID VALVE ASSY
23 042-40043-02
1PC, SPEED CONTROLLER, ASN2-M5
24 035-60395-43
2PC, GASKET
25 221-31745