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C30HVRT Compressor Unit Instruction Manual

PIN No.

PIN No.Input Signal

Output Signal

C30HVRT REMOTE/RESPONSE

(SRCN6A25-16P)

Wire gauge: AWG22 - 18

ALARM1

ALARM2

COMP START

COMP STOP

COM

COMP RUN1

COMP RUN2

(GND)

COMP ON/OFF

COM

(Reserved for Factory test)

Figure 4-7 Remote connector pin assignments for C30HVRT

(View of from the plug soldering side)

A typical wiring for C30HVRT with a single cryocooler in “Alternate operating mode” is

shown in Figure 4-8. Also, a typical wiring for C30MVR with three cryopumps in

“Momentary operating mode” is shown in Figure 4-11.

Equipment

Interface

(COMP START)

(COMP STOP)

COMP RUN1

ALARM1

(COM)

COMP RUN2

ALARM2

Answer-back

Input etc.

COM

COMP ON/OFF

COM

Command

Output

GND

REMOTE

RESPONSE

Figure 4-8 (C30HVRT) “Alternate operating mode” wiring example for Single

cryocooler operation

ULVAC CRYOGENICS INCORPORATED 4-7

Main Page

Table of Contents11
Compressor Unit Safety Instructions15
Disposal Considerations19
C30Hvrt_Compressor Description21
Introduction21
Terminology21
Cryocooler System Documents21
Roles of Compressor in Cryocooler System21
Compressor Specifications22
Figure 1-1 C30HVRT External View22
Table 1-3 Cooling Water Requirements24
Table 1-4 Table24
Component Descriptions25
Figure 1-5 Anchor Bolts Mounting Positions (Example)27
Section 2 Considerations before Installation32
Wiring Requirements32
Table 2-1 Input Power Cable Specifications32
Cooling Water Requirements33
Table 2-3 Table34
Figure 2-3 Cooling Water Flow Rate, Water Supply Temperature, and Water Pressure Loss35
Length of Cables and Flexible Hoses36
Remote Functions36
Table 2-5 Remote Interface Specifications36
Figure 2-6 Figure 2-6 Timing Chart for Alternate Operating Mode40
Figure 2-7 Timing Chart for Momentary Operating Mode40
Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode41
Figure 2-9 Signal Delay When the Time Period from a Stop to a Restart Is Short41
Figure 2-10 Timing Chart of C30HVRT When a Short Power Interruption Occurs42
Section 3 Unpacking, Inspection and Storage43
Compressor Carton43
Shipping Inspection43
Figure 3 1 Appearance of a Compressor Carton43
Unpacking44
Carton Contents45
Figure 3 2 Remove Cardboard and Insert Forks Underneath the Compressor45
Table 3-1 Carton Contents45
Inspection of the Compressor and Accessories46
Flexible Hoses and Specifications46
Table 3-2 Flexible Hose Specifications46
Figure 4-1 Installation Procedure49
Installation, Piping, and Wiring50
Connecting Cooling Water Piping50
Connecting and Disconnecting Helium Flexible Hoses50
Figure 4-2 Tighten with Hands First51
Cryocooler Connections52
Electrical Connections53
Figure 4-9 Connector Parts Descriptions56
Figure 4-10 Cut Length of Insulation Coating56
Figure 4-11 Fix with Set Screw57
Wire Rooting for Compressor and Other Equipments58
Operation59
Verification of Helium Static Pressure59
Compressor Operation60
Figure 5-4 Status Display During Operation62
Table 5-1 Supply Line Helium Pressure During Operation62
Inspection after Replacing Helium Circulation Components63
Precautions for When Compressor Is Not in Operation63
Maintenance Operation for a Compressor Stopped for a Long Period63
Section 6 Wiring and Piping Removal and Storage65
Removal of Wiring and Piping and Displacement of Compressor65
Maintenance in Storage65
Section 7 Maintenance69
Scheduled Maintenance69
Replacement of Adsorber69
Table 7-1 Scheduled Maintenance69
Figure 7-1 Remove Two Nuts from the Helium Gas Connectors71
Figure 7-2 Remove All Seven Screws from the Rear Panel71
Figure 7-3 Remove Self-Sealing Coupling71
Figure 7-4 Remove the Rear Panel71
Figure 7-5 Connecting and Disconnecting Self-Sealing Coupling with Two Spanners72
Figure 7-6 Remove the Bolt72
Figure 7-7 Slide out Adsorber Bottle72
Adjusting System Helium Pressure73
Figure 7-8 Locations of Front Panel Screws and Components Inside the Compressor75
Table 7-2 Preparation for Adding Helium Gas75
Figure 7-9 Items for Adding Helium Gas to the Compressor76
Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring78
Maintenance Parts78
Table 7-3 Maintenance Parts78
Troubleshooting79
Problem Types79
Troubleshooting Procedures80
Alarm Code Descriptions82
Appendix A Operating Log85
Appendix C C30HVRT Schematic Diagram87
Table C-1 Setting and Connections of Controller87
Figure C-1 C30HVRT Schematic Diagram88
Appendix D C30HVRT Compressor Flow Diagram89

Ulvac C30HVRT - Page 55

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