Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1½”), DeviceNet
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
24. Clean shaft feed through
Cleanroom wipes soaked
with isopropyl alcohol
Cleanroom wipes soaked
with isopropyl alcohol
Lubricate and install seals
26. Lubricate seal contact surface of valve
body with a slight film of 0.0125 ml
vacuum grease
27. Lubricate seal contact surface of shaft with
a slight film of 0.0125 ml vacuum grease
28. Lubricate each o-ring with a slight film of
0.0125 ml vacuum grease.
Pay attention: If required use new o-rings
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