Agilent Technologies 5530 - Positioning Optics for X-Axis and Y-Axis Measurements

Chapter 5 Straightness Measurements
Positioning the Laser Head and Target Machine
5-6 Measurements Reference Guide
Positioning optics for X-axis and Y-axis measurements
Figure 5-3. Positioning of optics for X-axis and Y-axis measurements
A
Measurement in a
horizontal plane along
the X-axis or Y-axis
B Measurement in a
vertical plane along the
X-axis or Y-axis
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1 Reflector oriented
horizontally
2 Interferometer mounted
in a spindle
3 Laser head
4 Reflector oriented
vertically
1
A
1
A
4
2
B
A
1
2
3
3