Agilent Technologies 5530 - Positioning Optics for Vertical Z-Axis Measurements

Chapter 5 Straightness Measurements
Positioning the Laser Head and Target Machine
Measurements Reference Guide 5-7
Positioning optics for vertical Z-Axis measurements
Figure 5-4. Positioning of optics for a vertical Z-axis measurement
A
Measurement
perpendicular to the
laser head along the
Z-axis
B Measurement parallel to
the laser head along the
Z-axis
************************
1 Interferometer assembly
mounted in a spindle
2 Reflector oriented
perpendicular to the
laser head
3 Laser beam
4 Laser head
5 Reflector oriented
parallel to laser head
A
B
1
0
7
7
2
A
T
U
R
N
I
N
G
M
I
R
R
O
R
H
E
W
L
E
T
T
-
P
A
C
K
A
R
D
1
A
1
0
7
72
-
6
7
0
02
AS
SY
1A
1
0
7
7
2
A
T
U
R
N
I
N
G
M
I
R
R
O
R
H
E
W
L
E
T
T
-
P
A
C
K
A
R
D
1
A
1
0
7
7
2
-
6
7
0
02
AS
S
Y
1
A
2
3
4
5
3
4
1
1