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Agilent Technologies 5530 - Checking the Alignment for Beam Strength for the Second Axis Measurement

Agilent Technologies 5530
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Chapter 7 Squareness Measurements in a Vertical Plane
Checking the Alignment for Beam Strength for the Second Axis
Measurement
Measurements Reference Guide 7-23
Figure 7-12. Position of the dots on the optical square after moving the
interferometer
2 Repeat step 1 until the machine reaches the end of the travel path.
You are now ready to check the alignment for beam strength.
Checking the Alignment for Beam Strength
for the Second Axis Measurement
Follow the instructions in “Checking the Alignment for Beam Strength” in
Chapter 5.
You are now ready to make the second axis measurement.
1
Two dots
90
OPTI
CA
L SQ
UAR
E
10777A
90
90
1
0
7
7
2
A
T
U
R
N
I
N
G
M
I
R
R
O
R
1A
1
0
772
-67002 A
SSY
1

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