Agilent Technologies 5530 - Page 232

Chapter 8 Parallelism Measurements
Positioning the Laser Head and Target Machine
8-8 Measurements Reference Guide
Figure 8-4. Positioning of optics for coplanar parallelism measurements
A
Measurement in a horizontal
plane along the Z-axis
B Measurement in a vertical
plane along the Z-axis
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1 Interferometer assembly
oriented horizontally in a
spindle
2 Interferometer assembly
oriented vertically in a
spindle
3 Reflector oriented vertically
4 Laser head
5 Reflector oriented
horizontally
1
0
7
7
6
AS
T
R
A
I
G
H
T
N
E
S
S
A
C
C
E
S
S
O
R
Y
1
0
7
7
6
A
S
T
R
A
I
G
H
T
N
E
S
S
A
C
C
E
S
S
O
R
Y
1
0
7
7
6-
6
70
0
1
S
T
R
.
R
E
T
R
O
R
E
F
L
E
C
T
O
R
1
0
7
7
6
-
6
7
0
0
1
S
T
R
.
R
E
T
R
O
R
E
F
L
EC
T
O
R
H
E
W
L
E
T
T
-P
A
C
K
A
R
D
H
E
W
L
E
T
T
-
P
A
C
K
A
R
D
SE
R
.
2
2
1
6
A
S
ER
.
2
21
6
A
4
1
4
5
A
B
2
3