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Agilent Technologies 5530
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Chapter 8 Parallelism Measurements
Making Spindle Parallelism Measurements
Measurements Reference Guide 8-19
Making the second set of measurements
To make the second set of measurements, follow these steps:
1 Rotate the reflector 180 degrees.
2 Select X
' on the Set Up Laser: PARALLELISM screen.
3 Repeat steps 2 through 8 in “Making the first set of measurements.”
A pop-up window is displayed. The parallelism measurement value is
displayed in the Parallelism field.
4 Write down the number displayed in the Parallelism field.
5 Select Previous.
You are now ready to make the third set of measurements.
Making the third set of measurements
To make the third set of measurements, follow these steps:
1 Rotate the reflector 90 degrees.
2 On the Analyze Data: PARALLELISM screen, select Main Menu.
The Metrology Main Menu is displayed.
3 On the Metrology Main Menu, select Other Meas, then select Parallelism.
The Set Up Laser: PARALLELISM screen is displayed (Figure 8-3).
4 Repeat steps 1 through 9 in “Making the first set of measurements.”
5 On the Analyze Data: PARALLELISM screen, select Next Axis.
You are now ready to make the fourth set of measurements.

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