Agilent Technologies 5530 - Page 249

Chapter 9 Flatness Measurements
Introduction
Measurements Reference Guide 9-3
Figure 9-1. Required hardware for flatness measurements
1
Foot spacing kit,
p/n 10759A
2 Angular interferometer,
p/n 10770A
3 Angular reflector,
p/n 10771A
4 Two alignment targets,
p/n 10767-67001
5 Two flatness mirrors with
base, p/n 10773A
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