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Agilent Technologies 5530
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Chapter 9 Flatness Measurements
Setting Up for the Measurement
9-8 Measurements Reference Guide
Figure 9-3. Measurement setup when flatness mirrors are not used
If you will use a flatness mirror for one or more lines, leave at least a
102 mm (4 inch) border along one edge. This border allows sufficient room
for you to place the flatness mirrors.
The other sides require only a 51 to 76 mm (2 to 3 inch) border. Figure 9-4
shows an example of the measurement grid necessary when flatness
mirrors are used.
1
Surface plate
2 Measurement grid
3 Laser head
4 Nameplate
* 76-mm (3-inch) margin
between grid and
surface plate
*
*
*
*
ABC
GFE
HD
8
7
1
2
2
3
3
4
5
6
1
4

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