Agilent Technologies 5530 - Page 264

Chapter 9 Flatness Measurements
Assembling and Mounting the Optics
9-18 Measurements Reference Guide
Figure 9-8. Positioning optics if flatness mirrors are not required
1
Straightedge
2 Surface plate
3 Reflector mounted on a
foot spacer
4 Interferometer mounted
on a flatness mirror base
5 Laser head
1
0
7
7
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5
3 4
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1A0101
1
0
7
7
0
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A
N
G
U
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O
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H
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A
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K
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D
1A0101