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Agilent Technologies 5530 - Page 271

Agilent Technologies 5530
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Chapter 9 Flatness Measurements
Aligning the Laser Beam to the Optics’ Travel Path
Measurements Reference Guide 9-25
If the beam moves out of the first flatness mirror, translate the laser head
vertically until the beam enters the first flatness mirror again.
5 Turn the flatness mirror on the interferometer assembly so that the beam
is vertically in line with the hole in the interferometer’s target.
6 Translate the laser head vertically so the beam enters the hole in the
interferometer’s target.
7 Remove the target from the interferometer.
8 Turn the flatness mirror on the interferometer assembly so that the
return beam is vertically in line with the target covering the laser head’s
return port.
Temporarily re-install the target and verify that the beam is still in the
hole on the target. If not, rotate the flatness mirror(s) so the beam
maintains its position in the target’s hole.
9 Tilt the laser head up or down until the return beam centers on the target
covering the laser head’s return port.
Be sure the beam maintains its position in the center of the flatness
mirror and the target’s hole.
10 Secure the first flatness mirror and the interferometer assembly to the
surface plate, maintaining the return beam’s position in the center of the
laser head’s target.
You are now ready to align the laser beam to the optics’ travel path.
Aligning the Laser Beam to the Optics’ Travel
Path
Follow the instructions in “Aligning the Laser Beam to the Machine’s
Travel Path for Long-Range Measurements” in Chapter 2. However, note
these exceptions:

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