110 Operation Manual
6 General Maintenance
Before Starting
Ammonia
Ammonia, used as a reagent gas, increases the need for foreline
pump maintenance. Ammonia causes foreline pump oil to break
down more quickly. Therefore, the oil in the standard foreline
vacuum pump must be checked and replaced more frequently.
Always purge the MS with methane after using ammonia.
Be sure to install the ammonia so the tank is in an upright
position. This will help prevent liquid ammonia from getting
into the flow module.