128 Operation Manual
6 General Maintenance
To Install a Filament
To Install a Filament
Materials needed
• Filament assembly, EI (G3170-60050)
• Filament assembly, CI (G1099-80053)
• Gloves, clean, lint-free
• Large (8650-0030)
• Small (8650-0029)
• Tweezers (8710-2460)
Procedure
1 Remove the old filament. (See “To Remove a Filament” on
page 126.)
2 Place the new filament into its position on the ion source
body. (See Figure 35.)
3 Secure the filament to the ion source body with the screw.
4 After installing the filament, verify that it is not grounded to
source body.
5 Reinstall the ion source. (See “To Change the Ion Source” on
page 94.)
6 Autotune the MS.
CAUTION
Do not overtighten the thumbscrew; it can cause air leaks or prevent
successful pumpdown. Do not use a screwdriver to tighten the
thumbscrew.