114 Operation Manual
6 General Maintenance
To Disassemble the EI Ion Source
To Disassemble the EI Ion Source
Materials needed
• Gloves, clean, lint-free
• Large (8650-0030)
• Small (8650-0029)
• Hex ball driver, 1.5 mm (8710-1570)
• Hex ball driver, 2.0 mm (8710-1804)
• Wrench, open-end, 10 mm (8710-2353)
• Nut driver, 5.5 mm (8710-1220)
• Tweezers (8710-2460)
Procedure
1 Remove the ion source. See “To Change the Ion Source” on
page 94.
2 Remove the filaments. See “To Remove a Filament” on
page 126.
3 Separate the ion focus and insulator assembly from the
source body. (See Figure 29.)
4 Remove the two screws from the ion focus insulator and
separate it from the ion focus lens.
5 Remove the extractor lens and its insulator from the source
body.
6 Remove the two screws from the RIS bayonet mount on the
bottom of the source body, and remove the RIS bayonet
mount.
7 Remove the repeller assembly from the source body.
8 Disassemble the repeller assembly by separating the repeller,
the repeller cap, ring heater and sensor assembly. (See
Figure 29.)
9 Remove the clocking button from the repeller cap by
removing the screw that holds it in place. (See Figure 29.)
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