118 Operation Manual
6 General Maintenance
To Disassemble the CI Ion Source
To Disassemble the CI Ion Source
Materials needed
• Gloves, clean, lint-free
• Large (8650-0030)
• Small (8650-0029)
• Hex ball driver, 1.5 mm (8710-1570)
• Hex ball driver, 2.0 mm (8710-1804)
• Wrench, open-end, 10 mm (8710-2353)
• Nut driver, 5.5 mm (8710-1220)
• Tweezers (8710-2460)
Procedure
1 Remove the CI ion source. See “To Change the Ion Source” on
page 94.
2 Remove the filament. See “To Remove a Filament” on
page 126.
3 Remove the ion focus lens and insulator. (See Figure 31.)
4 Remove the two screws from the ion focus lens insulator and
separate it from the ion focus lens.
5 Remove the two screws from the RIS bayonet mount and
remove the repeller assembly.
6 Disassemble the repeller assembly by removing the ceramic
insulator and heater assembly from the repeller. (See
Figure 31.)
7 Take the repeller off the source body.
To Next Page
Loading...
Need help?
General
