General Maintenance 6
To Assemble the CI Ion Source
Operation Manual 121
7 Place the ion focus assembly on the source body, with the
insulator against the source body. Make sure all pins are
facing in the same direction.
8 Attach with the two screws.
Figure 32 Assembling the CI ion source
Bayonet mount
Repeller
Ring heater / Sensor assembly
RIS CI source body
Filament
Ion focus insulator
Ion focus lens
Clocking button