5.16 Operation of the load-lock pump
Note: Operation of the iH system with high inlet pressure may result in shaft-seal pressure warnings
(refer to Table 6-1): the operation of the iH system will not be affected, and you can ignore these
warnings.
If you have connected a load-lock pump to the iH system through an Interface Module, you
can use the following menus to control the operation of the load-lock pump:
•
Switch On.
•
Switch Off.
•
Setup/Service/Manual/Load lock pump.
5.17 Disconnect box and photohelic switch/gauge (accessories)
Operation of the pumping system with the disconnect box and photohelic switch/gauge is
described in the following sections. If the photohelic switch/gauge is not installed, all
references to it should be ignored.
The following sections assume that the disconnect box and photohelic switch/gauge (if fitted)
have been correctly installed and that the pump and accessories have been installed with
reference to their own instruction manuals.
5.17.1 Normal startup
•
Ensure that the door is closed and secured before operating the disconnect box.
•
Press the DRY PUMP POWER ON/RESET push button on the disconnect box control panel.
•
Control and monitoring of the system is now enabled through the Pump Display Terminal.
5.17.2 Restart after fault
WARNING
The disconnect box will remain live even with the door open. Do not attempt
any servicing in the box before you have isolated the incoming electrical
supply
Press the DRY PUMP POWER ON/RESET push button on the disconnect box control panel.
iH Dry Pumping System 5-15
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