1.14 Drip tray
The drip tray is fitted to the bottom of the iH frame (see Figure 1-1) and allows the collection
of potentially spilled liquids from the iH system, thereby satisfying SEMI S2 requirements.
1.15 Seismic brackets
The four seismic brackets, which are also used to secure the iH system to a pallet during
transit (see Figure 3-1), are fitted to the side of the iH frame. These brackets can be used to
protect the iH system during zone 4 earthquake conditions, thereby satisfying SEMI S2
requirements.
1.16 Labels
The labels provided warn against potential hazards, thereby satisfying SEMI S2
requirements.
The labels are placed on the iH system to: identify components; state required operating
procedures; and warn of residual risks. Figures 1-10 and 1-11 show the position and text of
these labels.
1.17 Exhaust enclosure
The exhaust enclosure fits around the exhaust pipe and check valve(see Figure 1-1), and
provides a means of extracting the enclosure in the event of an exhaust leak from the system,
thereby satisfying SEMI S2 requirements.
iH Dry Pumping Systems 1-25
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