1.18 iH Disconnect box (accessory)
The iH disconnect box accessory is used to energise and isolate the power supply to the iH
system. It also allows the isolation of the electrical supply during emergency, and for
maintenance and troubleshooting the system, thereby satisfying SEMI S2 requirements. Refer
to Section 8 for ordering information.
The functions of the disconnect box are described in the following sections. The disconnect
box control panel is shown in Figure 1-9.
1-26 iH Dry Pumping Systems
1. Isolation switch
2. Door Lock
3. Emergency off button
Figure 1-9 - Disconnect box general arrangement
4. Dry pump power On/Reset indicator lamp
5. Dry pump power On/Reset push button