BOC Edwards iH600 - Warning and Alarm Messages

Sensor data Units Notes
▼
HCDP pump current consumption A
HCDP pump power consumption kW
HCMB pump current consumption * A
HCMB pump power consumption * kW
Total running time hours Total run-time of the iH system.
Process running time ✝ hours Total run-time on process.
Process cycles ✝ - Process cycles.
iH cycles - The number of times the iH system has
been switched on/off.
HCMB pump temperature *
o
C/
o
F
HCDP pump-motor water manifold
surface temperature
o
C/
o
F
Exhaust temperature
▲
o
C/
o
F
HCDP pump body temperature
o
C/
o
F
Water flow - OK indicates the cooling-water flow is
acceptable; CHECK indicates that the flow
is too low, or that the water flow-switch is
faulty or disconnected: see Section 6.
Total nitrogen flow slm Total nitrogen flow rate through the Gas
Module.
Exhaust pressure kPa/psi
Shaft-seals purge pressure kPa/psi
Pump stop time seconds
Pump zero time
Valve 1*
seconds
- The open/closed state of the gate valve (if
an iH interface controlling a gate valve is
fitted).
Active gauge pressure
▲
mbar/kPa/Torr
Gas system configuration - "low", "medium", "med+exh" or "high".
Warning/alarm messages # - Refer to Section 6 for a list of the messages.
* iH600/iH1000 only.
✝ These display items require signals from the process tool to indicate when the process is on and off, hence these items
are only available if you have an iH Interface Module.
▲ Only available for display if the appropriate optional accessory is fitted to the iH system.
# These messages cannot be manually selected to be displayed on the Normal display, but will be automatically
displayed on the Normal display when a warning or alarm condition exists.
▼ NP or NR can also be displayed to identify the status of a sensor: refer to Section 4.4.
Table 5-2 - Status menu sensor reading displays
5-10 iH Dry Pumping Systems