BOC Edwards iH600 - Tracer Gas Analysis; Test Parameters; Test Results

2.13 Tracer gas analysis
IH600 pumping system tracer gas test results are as follows (see Tables 2-7 through 2-8): Note
that because the iH600 has the largest iH enclosure size, these results qualify the iH80 and
iH1000 enclosures.
Test Parameters
Tracer gas SF
6
Tracer gas concentration 4.00%
Tracer gas release rates 28 slpm
Tracer gas release point Exhaust check valve
Tracer release direction Toward top of pump
Process gas Nitrogen
Exhaust flow rate (m
3
/h) 180.0
Volume of enclosure (m
3
) 0.256
Free volume of enclosure (m
3
) 0.158
Air changes per minute 19
Enclosure modifications 142mm duct connected to top of enclosure
Table 2-7 - Test parameters
Gas Name Max Flow
(slm)
TLV
(ppm)
25% TLV
(ppm)
Value
Obtained
(ppm)
ERC Pass/Fail*
DCS 6 5 1.25 0.03 0.090 Pass
HCL 10 5 1.25 0.03 0.150 Pass
HF 10 3 0.75 0.03 0.150 Pass
NF
3
15 10 2.50 0.03 0.225 Pass
SiH
4
6 5 1.25 0.03 0.090 Pass
SF
6
12 1000 250 0.03 0.180 Pass
CIF
3
1.6 0.1 0.025 0.03 0.024 Pass
TEOS 0.7 20 5 0.03 0.0105 Pass
AsH
3
0.5 0.05 0.0125 0.03 0.0075 Pass
PH
3
0.5 0.3 0.075 0.03 0.0075 Pass
WF
6
0.5 10 2.5 0.03 0.0075 Pass
CO 1 50 12.5 0.03 0.015 Pass
H
2
2 4000 1000 0.03 0.03 Pass
* Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0 % of the TLV)
Table 2-8 - Test results
iH Dry Pumping Systems 2-19