BOC Edwards iH600 - Switch off Menu; Switch off

4-8 iH Dry Pumping Systems
Figure 4-4 - Switch off menu
SELECT PUMP
Process pump
SELECT PUMP
Load lock pump
SELECT PUMP
L/Lock + Process
ENTER
ENTER
ENTER
Normal [4-5]
Switch off
▼
▲
▼
▲
▼
☞
Single pump
menu (that is, no
load-lock pump
is
connected).
☞
Multi pump
menu (that is, a
load-lock pump
is connected).
AUTO SHUTDOWN <
FAST SHUTDOWN
▲
AUTO SHUTDOWN
FAST SHUTDOWN <
ENTER
▼
▲
▼
▲
ENTER Pump off
CANCEL Clears
ENTER
☞
Only available if you have
an iH Interface Module
fitted with an Auxiliary
Interface Card connected
to the iH system.
☞ Only available if you have
an iH Interface Module
fitted with an Auxiliary
Interface Card connected
to the iH system.