Bruker DektakXT User Manual

System Overview 2-1
2
SYSTEM OVERVIEW
The DektakXT
®
stylus surface profiler is an advanced thin and thick film step height measurement
tool. In addition to profiling surface topography and waviness, the DektakXT system measures
roughness in the nanometer range. Available with a standard manual sample-positioning stage (see
Figure 2-1) or an optional automatic X-Y or theta stage (see Figure 2-3), it provides a step-height
repeatability of 5Å (<0.6 nm).
In addition to taking two-dimensional surface profile measurements, the DektakXT system can
produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option.
Figure 2-1: DektakXT Stylus Profiler with the Standard Manual X-Y Sample-Positioning Stage
Hood-covered
measurement
head that
includes the
tower, camera,
illuminator, and
sensor
Scan stage
System base
Sensor head and
stylus
Manual sample-
positioning stage
Block sample
fixture (chuck)
Base foot
Bridge

Bruker DektakXT Specifications

General

Brand	Bruker
Model	DektakXT
Category	Laboratory Equipment
Language	English