4-10 Taking Measurements and Analyzing Data
Figure 4-11: Data Analysis Display
CREATING AN AUTOMATION RECIPE THAT INCLUDES
DESKEW POINTS
When you are developing an Automation recipe for a production reference sample, all programmed
X and Y coordinates relate to the position of that particular sample as it rests on the stage. It is
unlikely that you can load subsequent samples at the exact physical location of the reference point
that was used to define the Automation recipe.
To compensate for such skewing, you can establish Deskew reference and measurement points on a
reference sample at the time that the Automation recipe is defined. You may select any easily
identifiable landmarks on the reference sample as Deskew points (for example, the test pads on a
silicon wafer or substrate corners). When the system runs the Automation recipe, it refers to these
Deskew points to correct for variations in the positions of your samples.
To create and run an Automation recipe that includes Deskew points:
1 Position your reference sample on the stage so that the area that you want to use as your Deskew
reference point is visible in the Live Video Display. The Deskew reference point anchors the sample
location to a fixed stage position.
2 Click the Automation Setup button on the Ribbon. The Automation Editor appears.
3 Tower down .
4 To set the Deskew reference point:
a. In the Live Video Display, drive the stage to the area that you want to use as the Deskew reference point.
b. In the Automation Editor, click Set Reference Point. A red circle enclosing an R now appears in that
location (see Figure 4-12).
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