System Overview 2-3
• The 3D Mapping and Automation Options, which include an X-Y auto sample-positioning
stage (see Figure 2-3). In addition to 3D mapping (see Figure 2-15), these options provide
automation and programmability of up to 200 sites on samples of up to 150 mm (5.90 inches)
in diameter. The X-Y auto sample-positioning stage includes one of the following sample
fixtures (chucks):
• 50 mm to 76 mm (2 to 3 inch) wafer vacuum
• 101 mm to 152 mm (4 to 6 inch) wafer vacuum
• Dedicated 203 mm (8-inch) wafer vacuum
• Ceramic vacuum
• Dedicated photo voltaic vacuum
Figure 2-3: X-Y Auto Stage with Wafer Vacuum Sample Fixture (Chuck)
PROFILER COMPONENTS
As shown in Figure 2-1, the DektakXT stylus surface profiler system contains all of the mechanical,
electrical, and optical components for sample positioning, sample viewing, and
scanning/measurement. As described in Stage Configurations on page 2-2, the system can be
configured with a manual or X-Y auto stage. Its sturdy single-arch bridge design reduces sensitivity
to adverse environmental conditions.
Measurement Head
The hood-covered measurement head shown in Figure 2-1 houses a USB video camera and an LED
illuminator to assist the operator in feature location and stylus centering. The live video output of the
camera provides feedback to the operator during a scan measurement.
The measurement head also includes a sensor head that magnetically holds the stylus assembly and
contains the feedback mechanisms required to track stylus movement as it rides over the sample
surface.
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