Edwards EXS Series - Page 19

Table 6 Gas system ow opon
Gas system type
Descripon Valve
Gas ows (slm)
T
otal ow
L
V sha seal
purg
e
HV sha seal
purge
Balance
purge
Manually‐ adjus‐
ted gas ballast
EXS450/750 †
Gas ballast purge
(with manually adjus-
ted ow) + sha seal
purge
MV-3 HIGH VAC-
UUM MODE
MV-1 o
MV-2
o
6 0.01 6 0 12
MV-1 on
MV-2
o
6 0.01 6 50 12-62
MV-1 o
MV-2 on
6 0.01 6 80 12-92
MV-1 on
MV-2 on
6 0.01 6 130 12-142
MV-3 HIGH FLOW
MODE
MV-1 o
MV-2 o
6 6 0.01 0 12
MV-1 on
MV-2 o
6 6 0.01 50 12-62
MV-1 o
MV-2 on
6 6 0.01 80 12-92
MV-1 on
MV-2 on
6 6 0.01 130 12-142
† The dr
y pumping systems in a standard conguraon mus
t run with a seal purge. If the applicaon requires the removal of a seal purge, consult our
applicaon specialist.
07/2021 - ©Edwards Limited
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A41870880_A - Technical data