Inficon IC6

10 - 48
IPN 074-505-P1E
IC6 Operating Manual
11
(0x0b)
N/A
12
(0x0c)
Sensor
Thickness
4 or 32 <Float> or
<Float><Float><Float>
<Float><Float><Float>
<Float><Float>
kÅ
Returns sensor thickness
13
(0x0d)
Sensor Raw
Rate
4 or 32 <Float> or
<Float><Float><Float>
<Float><Float>
Å/s
Returns sensor raw rate. If sensor is not in
use, response will be 0 Å/s
Table 10-14 Status sensor (continued)
SS
Command
ID
Description
Number
of bytes
in the
response
Data Returned Notes