Inficon IC6

1 - 1
IPN 074-505-P1E
IC6 Operating Manual
Index
A
acoustic impedance 16-9
active oscillator 16-6, 16-8
Activity 3-14
aerial mass density 16-10
aggregate
rate 5-6, 5-16, 11-1
thickness 5-9
anharmonic 3-39, 16-2, 16-7, 16-9
unable to detect 3-39
AT
crystal 16-8
resonator 16-3
Auto Z 3-39, 12-1
unable to 3-39
Auto-Control-Tune 16-12, 16-15
AutoTune 12-5
Auto-Zero 3-11
averaging time 5-17
C
cable noise 2-6
calibration 12-3
cross talk 12-13
Checksum 10-7
co-deposition 3-29, 6-5, 12-14
Communications
network protocol 10-2
configure
sensor 3-26
source 3-26
control
system 16-14
controller
gain 16-13
model 16-11, 16-13
cross talk calibration 12-13
crucible 3-37
crystal
frequency spectrum 16-8
known, used 3-39
life 3-11
new 3-39
replacement 15-27
resonance frequency 3-37
resonance point 16-8
unknown, used 3-39
use history 3-43
Crystal12 3-37
CrystalSix 3-36
CrystalTwo 3-35
Customer Service 1-6
Customer Support
Return Material Authorization 1-6
D
DAC 2-7, 4-7
data entry 3-1
datalog 3-43
dead time 16-11
Declaration Of Contamination 1-6
density 5-3
calibration 12-1
value 12-1
deposition control
multiple sensor 11-1
single sensor 11-1
directory number 5-1
DTE 2-11
E
earth ground 1-4, 2-4
electrode-to-quartz bond 16-3
electromagnetic interference 2-7
error 3-28
Error Code 10-8
evaporation source. 16-11
event condition 9-7
F
fast source 16-11
feed ramp 5-15
File Access Code 3-42
film-induced stress 16-11
fit, weighted least-square-exponential 16-12
Frequency Response Method 16-12
fundamental 3-39, 16-7, 16-8, 16-9
H
Handheld Controller 3-2, 3-7, 3-40
hardware handshaking 10-5
I
I/O 8-1, 9-1
IAE 16-14
idle ramp 5-15
Input/Relay module 2-9
integral time 16-13