Inficon IC6

1 - 2
IPN 074-505-P1E
IC6 Operating Manual
IP Address 10-2
ISE 16-14
ITAE 16-14, 16-15
L
Laplace transform 16-12
layer 6-1
definition 3-26
pre-conditioning 3-29
layers
dummy 9-2
Life 3-11
Lock Code 7-9
logic statement 9-1, 9-20
M
mass sensitivity 16-1
material
definition 3-26
dielectric 3-11
measured deposition rate 16-13
measurement sensor 4-1
mode hopping 16-7
ModeLock oscillator 16-9
multiple layer deposition 12-4
N
net mask 7-5
O
Open Loop Method 16-12
P
parameter
commands 10-10
request established 10-10
period measurement technique 16-4
PID 5-4, 12-5, 16-11, 16-13, 16-15
power 16-13
process
automation 3-30
definition 3-25
description 6-1
error 16-13
execution 3-26, 3-27
layer definition 6-1
parameters 6-1
process definition 3-26
Program Lock code 3-42
pulse accumulator 16-4
Q
Quality 5-11
quality rate control 16-5
quartz crystal 16-1, 16-15
quasiharmonic 16-2, 16-9
Quick Tune 12-5, 16-15
R
rate
filter time 5-16
rate deviation 5-11
rate set point 16-13
RateWatcher 3-40, 5-19
reference oscillator 16-4
remote communication 10-1
Repair Service 1-6
resonance 16-6
Retry 10-2
RS-232 10-5
RS-232C 2-11, 10-1
S
Sales and Customer Service 1-6
sensor
diagnosing problems 15-20
installation 2-1
type 3-34
serial communication 2-11
series resonance 16-8
Service Center 1-6
source 5-5
control 3-37, 4-4
slow 16-11
spreadsheet program 3-43
spurious shift 16-10
status code 10-11
Subnet mask 10-2
Suspend 3-34
T
TEST mode 7-8
test mode 3-41
thickness shear mode 16-2
thickness twist mode 16-2
Time-Power 3-33
tooling 12-2
Transfer
Tooling 5-15
trend analysis 11-5
Tune 12-5, 16-15
turret
feedback 3-38
source 3-38