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Inficon UL5000 User Manual
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80
Calibration
iina74e 07.
fm
technical hand
book
(1408)
•
No action required.
Fig. 7-4:
External Calibration
, S
tep 4
•
No action required.
Fig. 7-5:
External Calibration
, S
tep 5
•
Close the external leak
standard and confirm with
OK
(
Soft Key no.
8).
Fig. 7-6:
External Calibration
, S
tep 6
79
81
Table of Contents
Default Chapter
2
Table of Contents
2
Trigger Level
2
1 General Information
6
Notes on the Use of this Handbook
6
Safety Symbols
6
Indications
7
Symbols of Vacuum Technology
7
Definition of Terms
7
Support from INFICON Service
9
Service Centers
10
Introduction
12
Purpose
12
Technical Data
13
Physical Data
13
Electrical Data
14
Other Data
14
Ambient Conditions
14
Unpacking
14
Supplied Equipment
15
Accessories and Options
16
Sniffer Line SL200
16
Toolbox
16
Helium Bottle Holder
16
ESD Mat
16
RC1000 Remote Control
17
2 Installation
18
Transportation
18
Working Location
20
Electrical Connections
21
Mains Power
21
Connections for the Data Acquisition Systems
23
Accessories
24
Digital out
24
Digital in
25
Recorder
26
Rs232
26
Remote Control RC1000 / Wireless Transmitter
26
Vacuum Connections
27
Inlet Port
27
Exhaust
27
Vent
27
Purge
27
Default Parameters
28
3 First Operation Check
29
Needed Equipment
29
Description of the Initial Operation
29
Startup and Measure
29
Internal Calibration
32
Verification
32
4 Description and Working Principle
33
Introduction
33
Components of the UL5000
33
Vacuum System
33
Control Panel
35
LC Display
35
START Button
35
STOP Button
36
ZERO Button
36
MENU Button
37
Soft Keys
37
Numerical Entries
38
Working Modes
39
Vacuum Mode
39
Sniffer Mode
40
5 Operation of the UL5000
41
Display
41
The Screen in Run-Up Mode
41
Display in Stand-By Mode
41
Purging
42
The Screen in Measurement Mode
42
Call for Calibration
42
Speaker Volume
43
Status Line in the Display
43
Numerical Display Mode
44
Trend Mode
44
HYDRO•S on / off
44
6 Description of the Menu
45
Main Menu
45
View
47
Scale Linear/Logarithmic
47
Display-Range Auto/Manual
48
Time Axis
48
Contrast
49
Background in Stand-By
49
Decimal Places
50
Lower Display Limit
50
Mode
51
Trigger & Alarms
52
Trigger Level 1
52
Volume
53
Trigger Level 2
53
Units
54
Alarm Delay
54
Audio Alarm Type
55
Pinpoint
55
Leak Rate Prop
55
Setpoint
56
Trigger Alarm
56
Calibration
56
Settings
57
Vacuum Settings
58
Automatic Purge
58
Vent Delay
59
Vacuum Ranges
59
Hydro•S
60
Leak Rate Internal Test Leak
60
Machine Factor
61
Booster TMP Mode
61
Zero & Background
61
Background Suppression
62
Calculate Inlet Area Background
62
Zero
63
Mass
63
Interfaces
64
Control Location
64
Recorder Output
65
RS232 Protocol
66
Scaling Recorder Output
67
Miscellaneous
68
Time&Date
68
Language
68
Leak Rate Filter
69
Mains Frequency
69
Service Interval Exhaust Filter
69
Service Message Exhaust Filter
70
Parameter Save / Load
70
Save Parameter Set
71
Load Parameter Set
71
Monitoring Functions
71
Information
74
Service
74
Access Control
75
Access to CAL Function
75
Access to Trigger&Alarme Menu
76
Change Device PIN
76
Change Menu-PIN
76
7 Calibration
77
Introduction
77
The Calibration Routines
77
Internal Calibration
78
Automatic Internal Calibration
78
Manual Internal Calibration
78
External Calibration
78
Factor of Calibration - Range of Values
81
8 Error and Warning Messages
82
Hints
82
List of Errors & Warnings
83
9 Maintenance Works
88
Hints
88
INFICON Service
89
Key for Maintenance Schedule
89
Maintenance Plan
90
Maintenance Groups
91
1500 Hours Maintenance
91
4000 Hours Maintenance
92
8000 Hours Maintenance
93
16000 Hours Maintenance
94
Description of the Maintenance Work
95
Opening the UL5000
95
Check/Replace the Filter Cell
96
Replacing the Exhaust Silencer
98
Turbomolecular Pump TMH
99
Scroll Pump
99
Appendix
100
Declaration of Conformity
102
5
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Inficon UL5000 Specifications
General
Brand
Inficon
Model
UL5000
Category
Security Sensors
Language
English
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