Inficon UL6000 Fab - Page 131

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Pressure p1 / Pressure
p2
1 ... 10 V; 0.5 V / decade;
logarithmic
1 V = 1 x 10
-3
mbar
Leak rate mantissa 1 ... 10 V; linear; in the
selected unit
Useful only if the other analog output is assigned
"Leak rate exponent".
Leak rate exponent 1 ... 10 V; 0.5 V / decade;
Step function;
1 V = 1 x 10
-12
; in selected
unit
Useful only if the other analog output "Leak rate
mantissa" or "Leak rate mantissa hyst." is assigned.
Linear leak rate 0 ... 10 V; linear;
in the selected unit
The upper limit (= 10 V) is set via the parameter
"Exponent upper limit” in whole decades. The lower
value is always 0 (leak rate), which corresponds to 0
V output voltage.
This setting is for both analog outputs, if an
appropriate output function is selected. Depending on
the selected leak rate unit there is a different absolute
limit.
The selected range can be additionally narrowed by
the limits, which is valid for all interfaces.