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Inficon UL6000 Fab - Replacement of the Filter Mat on the Bottom of the Device

Inficon UL6000 Fab
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INFICON Cleaning and maintenance | 8
UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206) 115 / 152
4 Remove the used air filter from the plastic grid and insert a new one.
5 Refit the plastic grid together with the new air filter.
8.3 Replacement of the filter mat on the bottom of
the device
Filter mat bottom of the device
Required tools Screwdriver
Check the filter mat periodically and change it, if the filter mat is significant dirty.
ü They consist of a new filter mat.
1 Make sure that the device is disconnected from the power supply by pulling the
power plug securely.
2 To reach the filter mat, loosen the knurled screw on the front of the device at
the bottom.
3 Remove the metal sheet with the filter mat. The metal sheet can be pulled out
more easily by holding it in an inclined position.

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