4 | Description INFICON
34 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
UL6000 Fab, UL6000 Fab PLUS
Degree of contamination ***) 2
**) Measuring condition for 40°C ambient temperature: Measuring mode ULTRA, gas
load 35 sccm
***) According to DIN EN 61010-1: Only non-conductive contamination. Occasionally,
temporary conductivity may occur due to condensation.
4.5 Factory settings
Leak rate setpoint 1 1 x10
-9
mbar l/s
Leak rate setpoint 2 1 x10
-8
mbar l/s
Leak rate setpoint 3 1 x10
-7
mbar l/s
Leak rate setpoint 4 1 x10
-6
mbar l/s
Automatic purge On
Volume 2
ZERO mode I•ZERO 2.0
Calibration request Off
TMP ventilation On (can only be changed by service)
Interfaces leak rate unit vacuum operation mbar l/s
Interfaces leak rate unit sniffer operation mbar l/s
Interface pressure unit mbar
Mass 4 (helium)
Protocol on the IO1000 RS232 connection ASCII
Analog output IO1000 channel 1 Leak rate mantissa
Analog output IO1000 channel 2 Leak rate exponent
Analog output IO1000 scaling 0.5 V / decade
Digital output pin 1 (IO1000) Calibration request (inverted)
Digital output pin 2 (IO1000) Error or warning (inverted)
Digital output pin 3 (IO1000) Setpoint 1 (inverted)
Digital output pin 4 (IO1000) Setpoint 2 (inverted)
Digital output pin 5 (IO1000) Measuring
Digital output pin 6 (IO1000) ZERO active
Digital output pin 7 (IO1000) Ready for operation
Digital output pin 8 (IO1000) Calibration active
Digital input pin 1 (IO1000) VENT
Digital input pin 2 (IO1000) Sniff
Digital input pin 3 (IO1000) START
Digital input pin 4 (IO1000) Stop