Inficon UL6000 Fab - Activate Vacuum Ranges; Influence the Speed of the Backing Pump; Switch TMP2 Mode on or off; Hydro•S

6 | Operation INFICON
66 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
2 Adjust.
3 Save .
6.3.4 Activate vacuum ranges
Vacuum ranges You can activate the vacuum ranges MASSIVE, GROSS, FINE and ULTRA for your
measurements.
All 4 areas can be activated at the same time. If several areas are activated, they
switch automatically depending on the inlet pressure p1. In this way different
sensitivities can be measured with.
At least one range must be activated.
ü Operator or Supervisor rights
1 > Setup > Measurement > Vacuum > Vacuum ranges
2 Activate the desired vacuum range under "Vacuum range".
3 Save .
6.3.5 Influence the speed of the backing pump
ü Supervisor rights
1 > Setup > Measurement > Vacuum > Backing pump
2 If necessary, change the setting of the "backing pump mode" field.
ð "Automatic" (factory setting)
The speed of the backing pump is lowered if possible.
ð "Fixed"
The backing pump is operated at a fixed speed.
6.3.6 Switch TMP2 mode on or off
ü Supervisor rights
1 > Setup > Measurement > Vacuum > TMP2
2 If necessary, change the setting of the “TMP2 Mode” field.
ð Automatic (factory setting)
The TMP2 starts automatically when evacuating and stops when changing to
standby. This is the recommended setting for maximum performance.
ð Disabled: The TMP2 does not start.
6.3.7 HYDRO•S
If you are testing large test objects during vacuum operation, you can reduce the time
to ready for measurement by using HYDRO•S, see also Operation mode "Vacuum"
[}18].