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Inficon UL6000 Fab - Measuring Helium Ambient Concentration

Inficon UL6000 Fab
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6 | Operation INFICON
80 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
ð By clicking on the unit or the volume display, you can go directly to the I•RISE
settings.
ð By clicking on the setpoint marker, you can go directly to the I•RISE setpoint
setting.
ð By clicking on the axis labels you can go directly to the settings for displaying
the I•RISE diagram.
2 To stop the I•RISE measurement, press again .
Change the display of the I•RISE diagram
ü Operator or Supervisor rights
1 > Display > I•RISE Chart
2 Select between the different viewable ”Decades”.
3 To dynamically adjust the upper and lower limit on the leak rate, activate the
option "Autoscale".
4 In the field "Time axis" select the length of the time axis "60", "120", "240" or
"480" seconds.
5 If the option "Autoscale" is not active, select "Lower diagram limit" in the field
the desired decade.
6 Save .
6.6 Measuring helium ambient concentration
The natural content of helium in the ambient air is about 5.2 ppm.
You can examine the ambient air for an increased helium content (helium
contamination) to determine the appropriate time for further measurements.
ü The operation mode "Vacuum" is set.
ü The gas chosen is “helium“
4
He. See also "Select gas [}65]".

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